Karl suss ma56 manual

The Karl Suss MA6 is a top and bottom side mask aligner used for fine lithography down to 1 micron or below. 2. W mercury arc lamp i-line (nm) with "smart power supply" is capable of operating in constant power mode, or constant intensity mode. The default is constant intensity mode. In this mode, the lamp deteriorates; the power is. o Appropriate Tool Manuals 3 DEFINITIONS n/a 4 TOOLS AND MATERIALS General Description The Karl Suss MA56 may be set up to align and expose with various sized wafers and masks. The features on the mask will print the same size on the wafer so stepper masks will not work on this aligner. Mask Holders. Equipment: Karl Suss MA56 Mask Aligner Exposure System Manufacturer: Suss MicroTec / Karl Suss Equipment Description: The Karl Suss MA 56 is a mask alignment and exposure system that has highly ecnomonical production capabilities for wafers up to mm. It's easy to maintain and can be easily adapted to fit your particular process requirements.

Karl Suss MA6 Mask Aligner. Figure 1: MA6 Mask Aligner. Introduction. The Karl Suss MA6 is a top and bottom side contact lithography printer used for fine line lithography down to 1 micron or better. It is capable of processing 4-inch substrate. After reading this manual, the User. The Karl Suss MA6 is a top and bottom side mask aligner used for fine lithography down to 1 micron or below. 2. W mercury arc lamp i-line (nm) with "smart power supply" is capable of operating in constant power mode, or constant intensity mode. The default is constant intensity mode. In this mode, the lamp deteriorates; the power is. Description. This Karl Suss MA56 Mask Aligner was sent back to the factory and was rebuilt and since then has not been used. It is in excellent condition (New in ). As seen in the photos this tool is missing the power supply but we may be able to source one for an additional cost. Let us know if you have any questions.

Features: Cassette to cassette mask aligner can be used manually in auto mode Unable to fully test equipment Information: KARL SUSS MASK ALIGNER MA SUSS MicroTec is looking back on sixty years of ductor Industry in the early 60s, Karl. Süss' Mask Aligners manual 2'' contact printers to the ful-. The purpose of this document is to detail the use of the Karl Suss MA56 Mask Aligner. All users are o Appropriate Tool Manuals.